title = {Grid and geometry techniques for multi-layer process simulation},
author = {Zahir Sahul and Robert W. Dutton and M. Noell},
booktitle = {Proc. Simulation of Semiconductor Devices and Processes (SISDEP '93)},
publisher = {Springer-Verlag},
editor = {Siegfried Selberherr},
year = {1993},
url = {}}

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