Grid and geometry techniques for multi-layer process simulation
Zahir Sahul,
Robert W. Dutton,
and M. Noell
Proc. Simulation of Semiconductor Devices and Processes (SISDEP '93), Siegfried Selberherr, ed., Springer-Verlag, 1993
http://www-tcad.stanford.edu/tcad/pubs/sahul/sisdep93.ps.Z
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